| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2008-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2542172aea443ab8e6be4d51d80b50fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7feabab4404851399270b8110a2a8848 |
| publicationDate |
2008-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2008281990-A |
| titleOfInvention |
Novel polymer and photoresist compositions |
| abstract |
Currently available photoresists are suitable for many applications, but current resists are also particularly high performance applications such as highly resolved sub-half micron and sub-quarters. There may be significant drawbacks in the formation of sub-quarter micron features. The present invention relates to novel polymers comprising units containing one or more photoacid generator groups and to photoresists comprising the polymers. Preferred polymers of the present invention are suitable for use in photoresists imaged at short wavelengths, eg, less than 250 nm or less than 200 nm, especially 248 nm and 193 nm. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101705043-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110079556-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012181511-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011178988-A |
| priorityDate |
2007-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |