| abstract |
The present invention is to drain water from a substrate and efficiently dry the substrate without causing destruction or contamination of the substrate, and particularly to drain a substrate having a high aspect columnar and / or high aspect hole structure. A substrate drainer comprising 1,1,1,3,3,3-hexafluoro-2-propanol as a component and having a columnar pattern and / or a hole pattern on the substrate, and the use thereof A draining method and a drying method for further drying after draining. [Selection figure] None |