http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007530797-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-5096 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 |
| filingDate | 2005-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007530797-A |
| titleOfInvention | Method and apparatus for forming a metal layer |
| abstract | Methods and processing tools are provided for forming a metal layer with improved morphology on a substrate. The method includes pretreating the substrate by exposing the substrate to a chemical species excited in plasma, exposing the pretreated substrate to a process gas containing a metal carbonyl precursor, and Forming a metal layer on the pretreated substrate by chemical vapor deposition. Metal carbonyl precursors include W (CO) 6 , Ni (CO) 4 , Mo (CO) 6 , Co 2 (CO) 8 , Rh 4 (CO) 12 , Re 2 (CO) 10 , Cr (CO) 6. , Or Ru 3 (CO) 12 , or any combination thereof, and the metal layer may each include W, Ni, Mo, Co, Rh, Re, Cr, or Ru, or any combination thereof. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013194247-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010067638-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011142288-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012102404-A |
| priorityDate | 2004-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.