http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007293075-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2006-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27014e252d3d3b9b91be887e65d63597 |
| publicationDate | 2007-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007293075-A |
| titleOfInvention | Radiation-sensitive resin composition and use thereof |
| abstract | Disclosed is a radiation-sensitive resin composition capable of easily processing a thick film wiring pattern and having extremely low pattern defects such as bubbles and deformation in the wiring pattern. Moreover, the wiring formation material which uses the composition of this invention is provided. [1] Sensitivity containing 0.5% by mass or less of a compound containing the following (A), (B) and (C) and having a boiling point of 250 ° C. or less at 1 atm in the total amount of the composition. Radiation resin composition. (A) An alkali-soluble resin represented by (a) below (a) A novolak resin obtained by condensing a phenol compound and an aldehyde compound. (B) Epoxy-containing silicon compound. (C) A compound that generates an acid upon irradiation with radiation. [2] A wiring forming material comprising the radiation sensitive resin composition. [3] A semiconductor device having a metal wiring pattern obtained using the wiring forming material. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104614942-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009265450-A |
| priorityDate | 2006-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 335.