| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
2005-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cf5ed2bb9f51004891e082dfb48740f |
| publicationDate |
2007-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007088379-A |
| titleOfInvention |
Aqueous polishing liquid and chemical mechanical polishing method |
| abstract |
PROBLEM TO BE SOLVED: To provide a water-based polishing liquid having a rapid CMP rate and little dishing in the production of semiconductor devices such as IC chips and LSIs, and a chemical mechanical polishing method using the water-based polishing liquid. SOLUTION: It contains an oxidizing agent, a 5-membered monocyclic compound having three or more nitrogen atoms, a compound in which a heterocyclic ring is condensed to the compound, and a compound having an imidazole skeleton or an isothiazolin-3-one skeleton. And a chemical mechanical polishing method comprising: polishing in a relative motion while bringing the surface to be polished and the polishing surface into contact with each other in the presence of the aqueous polishing liquid. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009004590-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015005762-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8425276-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010118378-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010118377-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013102176-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017212971-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009123880-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6301571-B1 |
| priorityDate |
2005-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |