| abstract |
System component corrosion monitoring by light radiation United States Patent Application 20070228305 Kind Code: A1 A method and system for monitoring system component corrosion in a plasma processing system is provided. The system component includes an emitter capable of producing characteristic fluorescent radiation when exposed to a plasma. The method utilizes light emission to monitor the fluorescence emission from the emitter to determine the status of system components. The method can evaluate corrosion of system components in the plasma by monitoring the fluorescence emission from the emitter. Consumable system components that can be monitored using the method include a ring (60, 62), a shield (14), an electrode (24), a baffle (64), and a liner. |