http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006111739-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate | 2004-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bad9357e3e7579904cee788becdc26f8 |
publicationDate | 2006-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2006111739-A |
titleOfInvention | Surface hydrophobizing composition, surface hydrophobizing method, semiconductor device and manufacturing method thereof |
abstract | PROBLEM TO BE SOLVED: To provide a surface hydrophobizing composition, a surface hydrophobizing method, a semiconductor device and a manufacturing method thereof for the purpose of repairing damage to a siloxane insulating layer after etching / ashing used in an electronic device such as a semiconductor device. Get. A composition comprising a cyclic silane monomer and an organic solvent. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102463291-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200124574-A |
priorityDate | 2004-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 310.