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filingDate 2019-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2020-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20200124574-A
titleOfInvention Etching composition for silicon nitride layer and etching process of silicon nitride layer using the same
abstract Phosphorylated compounds; water; And a predetermined first compound, a reaction product of the first compound, a predetermined second compound, a reaction product of the second compound, or a combination thereof. A composition for etching a silicon nitride layer including, and an etching method performed using the same are disclosed.
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