| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2003-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54f2b83a4e621366fedf43b1eb84c17f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c54b8bee1dbdeb42d0cfe9a246d4ffa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ed30f887c743f5ec92bb9f54f2823bd |
| publicationDate |
2005-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005019853-A |
| titleOfInvention |
Plasma cleaning method and substrate processing method |
| abstract |
Cleaning is performed by igniting plasma in a cleaning gas containing a halogen compound. A plasma is ignited by introducing a mixed gas of a rare gas and a halogen gas into a plasma generator at a pressure lower than a predetermined pressure used in a predetermined cleaning process. Thereafter, the pressure of the mixed gas is increased to the predetermined pressure. [Selection] Figure 8 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010262987-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008186864-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2021085158-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010125995-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7257543-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016537824-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010199310-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008060304-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015221428-A |
| priorityDate |
2003-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |