| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-32 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-515 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2003-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d68dd74c0090fab987a546dfe948ccf5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6da1e102a0c3bcd1aa52dc199ff448b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7473073dadbeac4aea2675cd36898ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fe5efe4c42606f7a2ce7a1be4be1a19 |
| publicationDate |
2004-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004270022-A |
| titleOfInvention |
Method for producing thin film and thin film |
| abstract |
An object of the present invention is to provide a thin film of good quality when forming a thin film by generating discharge plasma using a source gas containing carbon atoms in a relatively high-pressure atmosphere of 100 Torr or more. A substrate is provided on at least one of opposed electrodes. By applying a pulse voltage between the counter electrodes 4 and 5 under an atmosphere containing a source gas A containing a carbon source and a pressure of 100 to 1600 Torr, discharge plasma is generated, and a thin film 7 is formed on the substrate 6. . The pulse duration of the pulse voltage is 10 to 1000 nsec. [Selection] Fig. 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012233257-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007138253-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015119199-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013220987-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009242879-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9217195-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7750574-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007194110-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4566119-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007257860-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007327089-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012144580-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009084591-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7914692-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4578412-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7923377-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007146262-A |
| priorityDate |
2003-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |