| abstract |
In a heater member including a base material and a heat source for heating the base material, quick heating responsiveness is maintained, temperature uniformity is improved, and durability is improved. A member for heating 1, 1A covers a base material 3 having a thermal conductivity of 5.0 W / m · K or more, a heat source 2 for heating the base material 3, and at least a part of the base material 3. Amorphous carbon films 4 and 5 having a thermal conductivity of 0.5 W / m · K or less are provided. [Selection] Figure 1 |