http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009242879-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2008-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd023ba85a9f86c120760faa49dc59f0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fe5efe4c42606f7a2ce7a1be4be1a19 |
| publicationDate | 2009-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009242879-A |
| titleOfInvention | DLC deposition method |
| abstract | A DLC film is generated at a higher deposition rate than in a vacuum while reducing the amount of carrier gas used. A DLC film forming apparatus includes a support electrode connected to a ground and supporting a substrate, and a mixed gas injection port that is provided at a position facing the support electrode and serves as a mixed gas injection port. A counter electrode 16, a gas injection head 21 having a barrier gas injection port 21 a which is provided next to the counter electrode 16 and is a barrier gas injection port, a chamber 20 including the support electrode 14 and the counter electrode 16, and the support electrode 14 And the counter electrode 16 are provided with a DC pulse generating circuit 22 having a pulse supply source for applying a DC pulse voltage. When the DLC film is generated, a mixed gas is injected from the mixed gas injection port 16a, a barrier gas is injected from the barrier gas injection port 21a, and a DC pulse voltage is applied to the support electrode 14. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11728141-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11244811-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018174340-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2107593-A3 |
| priorityDate | 2008-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.