| abstract |
A method for synthesizing a norbornene-based resist monomer suitable for production on an industrial scale is provided. An α-substituted acrylic acid is reacted directly with a substituted norbornene. The reaction is preferably performed in the presence of an acid catalyst. Examples of the acid catalyst include phosphoric acid, sulfuric acid, hydrochloric acid, p-toluenesulfonic acid, trifluoroacetic acid, trifluoromethanesulfonic acid, boron trifluoride, titanium tetrachloride, At least one selected from the group of tin chloride is preferred. According to the present invention, the reaction mixture is maintained at a low viscosity throughout the reaction and purification steps, so that handling thereof is significantly facilitated. [Selection diagram] None |