| abstract |
An object of the present invention is to provide a cleaning agent which does not attack copper when cleaning copper used as a wiring material of a semiconductor device. The present invention relates to a detergent containing a cyanoalkylamine as a detergent. As the cyanoalkylamine, cyanoethylamines can be suitably used. Specifically, N- (2-cyanoethylamine) is used. ) Trimethylenediamine, N- (2-cyanoethyl) -N-methylethylenediamine, N- (2-cyanoethyl) -N-methyltrimethylenediamine, N-methyl-N- (2-cyanoethyl) amine and the like can be used. it can. [Selection diagram] No selection diagram |