| abstract |
A high-intensity laser light source is provided. Also provided are an exposure head and an exposure apparatus capable of obtaining a deep depth of focus. An optical fiber of a bundle-like fiber light source 66 is made into an optical fiber having a uniform core diameter and a clad diameter at an output end smaller than a clad diameter at an input end, and the light emitting region is reduced. From the bundled fiber light source 66 with increased brightness, the angle of the light beam passing through the lens system 77 and entering the DMD 50 is reduced, and the angle of the light beam entering the scanning surface 56 is reduced. That is, the depth of focus becomes deep. [Selection] Figure 15 |