http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4646759-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2005-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4646759-B2 |
| titleOfInvention | Pattern forming material, pattern forming apparatus and pattern forming method |
| priorityDate | 2005-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 1315.