http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003332314-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 |
| filingDate | 2002-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cc6b12671522bbbef78f64e82a70e5e |
| publicationDate | 2003-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2003332314-A |
| titleOfInvention | Electrode for plasma processing apparatus and plasma processing apparatus |
| abstract | PROBLEM TO BE SOLVED: To provide an electrode for a plasma processing apparatus and a plasma processing apparatus which can reduce the running cost as compared with the related art and can reduce the manufacturing cost of a semiconductor device or the like. SOLUTION: An upper electrode 20 is configured so that the whole shape is substantially a disk shape, and an inner member 200 (first member) provided with a number of gas discharge holes 21; And an outer member 201 (a second member) formed in an annular shape so as to surround the periphery of the inner member 200 when the inner member 200 is consumed by performing the plasma processing. It is configured to be exchangeable only. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010225644-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8383000-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015106652-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009152434-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013533388-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009004713-A |
| priorityDate | 2002-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 19.