| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-5096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 |
| filingDate |
2001-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81708f5a1e074289b55890c2db7c0902 |
| publicationDate |
2003-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2003197615-A |
| titleOfInvention |
Plasma processing apparatus and cleaning method thereof |
| abstract |
(57) [Problem] To provide a plasma processing apparatus capable of performing efficient cleaning and a cleaning method thereof. SOLUTION: An exhaust pipe 37 is provided which is directly connected to a diffusion portion 29a for diffusing a process gas formed inside an upper electrode 26 functioning as a shower head. Cleaning exhaust line L4 having exhaust pipe 37 as one end Is connected to an exhaust port 36, and is connected to an exhaust line L3 for exhausting the inside of the chamber 11. The cleaning gas supplied from the cleaning gas line L2 is exhausted from inside the chamber 11 through the inside of the upper electrode 26. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102357845-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016009742-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009283699-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007533848-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009041095-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5762602-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007010887-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009512221-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007027490-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7299739-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160094424-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017505377-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7027050-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101285750-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018011050-A |
| priorityDate |
2001-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |