| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3593a13cc4ab7079f7a69ef885b5a005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C45-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate |
2001-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8033a57fd034477697005e0d6fd313bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30466d5bd65bef24e0f494ea06033bdb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_295155f285f4ddd9f5b439de43a53a80 |
| publicationDate |
2002-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002249455-A |
| titleOfInvention |
Method for producing high-purity hafnium complex Hf (DPM) 4 |
| abstract |
PROBLEM TO BE SOLVED: To provide a hafnium complex Hf (DP) as a raw material for forming a hafnium-containing metal oxide film by a CVD method. M) Provision of a method for producing 4 with ultra-high purity and good reproducibility. SOLUTION: Under an inert gas atmosphere, hafnium chloride and dipivaloylmethane are put into a purified and dehydrated organic solvent, heated and refluxed to cause a direct reaction, and the solution is concentrated. Then, the concentrated solution is cooled. By sufficiently purifying the obtained crystals by recrystallization, the content of metal impurities is 0.01 wt. Ppm or less and the purity is 99.99 w / w. A method for producing a high-purity hafnium complex represented by a structural formula of Hf (DPM) 4 of 999 wt.% Or more. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10526697-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005197675-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113219110-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102360536-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009292731-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200072562-A |
| priorityDate |
2001-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |