http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102360536-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G41-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F11-00 |
| filingDate | 2016-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102360536-B1 |
| titleOfInvention | High-purity tungsten hexacarbonyl for solid source delivery |
| abstract | A solid source material for forming a tungsten-containing film is described. The solid source material is tungsten hexacarbonyl, wherein the molybdenum content is less than 1000 ppm. This solid source material is prepared by the steps of: providing fine tungsten hexacarbonyl raw material particles having a size of less than 5 mm, wherein the particles having a size greater than 1.4 mm are less than 15% of the particles and the content of molybdenum is less than 1000 ppm, and sintering the particulate tungsten hexacarbonyl raw material particles at a temperature of less than 100° C. to produce the solid source material as a sintered solid. |
| priorityDate | 2015-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.