| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d652f9095aa3c4510ff17ba0a1835d2a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02189
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31691
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02159
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24 |
| filingDate |
2000-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5194162e80f0c4d36ee765f34d0abe26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3f4c01475aa309558b474470129ed61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6baa4835f68f626f365fc9d2e18da9f3 |
| publicationDate |
2001-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001200363-A |
| titleOfInvention |
Conformal thin films on textured capacitor electrodes |
| abstract |
(57) Abstract: A method for forming a capacitor in an integrated circuit is provided. The method includes constructing a bottom electrode that includes a textured silicon layer; and depositing a dielectric layer on the textured silicon layer, wherein the deposition is performed on a first reactant species. Forming a monolayer of less than or equal to about one of the first material on the textured silicon layer by exposure of the first material; and reacting the second reactant species with the first material; Including leaving no more than about one monolayer of the second material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4621241-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013002285-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005509093-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004296814-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010528118-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007274002-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005509287-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013002285-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4563655-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005521792-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017126207-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7141846-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004327607-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9677001-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4746269-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005537639-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008124474-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022049459-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022038450-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9909062-B2 |
| priorityDate |
1999-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |