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filingDate 2000-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2001-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2001174983-A
titleOfInvention Photoresist composition for TIPS process
abstract (57) [Summary] [Problem] TIPS (Top-Surface Imaging Process by Si The present invention provides a photoresist composition for lylation and a TIPS process using the composition. SOLUTION: The photoresist composition containing a photoresist resin, a photoacid generator, and an organic solvent, further comprising an amphoteric compound (amphoteric compound), a photoresist composition for TIPS.
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