http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000345036-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04 |
filingDate | 1999-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25de3dd344e376233255ba3ca16e39ba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f07e51afdf7d05bd6286bcdce8196bfd |
publicationDate | 2000-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2000345036-A |
titleOfInvention | Composition for forming film and material for forming insulating film |
abstract | PROBLEM TO BE SOLVED: To form a coating film having a uniform thickness suitable for an interlayer insulating film in a semiconductor device, etc., to cure in a short time, to have excellent dielectric constant characteristics, and to have a low hygroscopicity. Providing a forming composition. SOLUTION: (A) (A-1) R 1 a Si (OR 2 ) 4-a (wherein, R 1 represents a hydrogen atom, a fluorine atom or a monovalent organic group, R 2 represents a monovalent organic group, and a represents 0 to 2 And (A-2) R 3 b (R 4 O) 3-b Si- (R 7 ) d -Si (OR 5 ) 3-c R 6 c wherein R 3 , R 4 , R 5 and R 6 may be the same or different and each represents a monovalent organic group; b and c may be the same or different; R 7 represents an oxygen atom or — (CH 2 ) n —, d represents 0 or 1, and n represents a number of 1 to 6), a hydrolyzate thereof and / or a condensate thereof, And (B) a silatrane compound. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10836962-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11365350-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102024758-B1 |
priorityDate | 1999-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 689.