http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000345036-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
filingDate 1999-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25de3dd344e376233255ba3ca16e39ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f07e51afdf7d05bd6286bcdce8196bfd
publicationDate 2000-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2000345036-A
titleOfInvention Composition for forming film and material for forming insulating film
abstract PROBLEM TO BE SOLVED: To form a coating film having a uniform thickness suitable for an interlayer insulating film in a semiconductor device, etc., to cure in a short time, to have excellent dielectric constant characteristics, and to have a low hygroscopicity. Providing a forming composition. SOLUTION: (A) (A-1) R 1 a Si (OR 2 ) 4-a (wherein, R 1 represents a hydrogen atom, a fluorine atom or a monovalent organic group, R 2 represents a monovalent organic group, and a represents 0 to 2 And (A-2) R 3 b (R 4 O) 3-b Si- (R 7 ) d -Si (OR 5 ) 3-c R 6 c wherein R 3 , R 4 , R 5 and R 6 may be the same or different and each represents a monovalent organic group; b and c may be the same or different; R 7 represents an oxygen atom or — (CH 2 ) n —, d represents 0 or 1, and n represents a number of 1 to 6), a hydrolyzate thereof and / or a condensate thereof, And (B) a silatrane compound.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10836962-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11365350-B2
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priorityDate 1999-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21903618
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21924106
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548373
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415774542
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410538345
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426250363
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http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451514064
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158349237
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31254
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18137
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419590337
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http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454125583
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7957
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21903282
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415757656
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http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11520
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21479884
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http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87948292
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http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21902898
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410573761
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http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12384
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http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426246105
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http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537207
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http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21894366
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http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419483407
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14533277
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Total number of triples: 689.