abstract |
An etchant composition includes a silane compound represented by the following Chemical Formula 1: n n n n n n n n n n n n wherein R 1 to R 6 are independently hydrogen, halogen, a substituted or unsubstituted C 1 -C 20 hydrocarbyl group, a phenyl group, a C 1 -C 20 alkoxy group, a carboxy group, a carbonyl group, a nitro group, a tri (C 1 -C 20 ) alkylsilyl group, a phosphoryl group, or a cyano group, L is a direct bond or C 1 -C 3 hydrocarbylene, A is an n-valent radical, and n is an integer of 1 to 4. |