abstract |
The invention relates to anthracenylmethyl (meth) acrylates corresponding to one of the following formulas: (CF DRAWING IN BOPI) (CF DRAWING IN BOPI) (chemical formula 19) (chemical formula 20) The invention also relates to the preparation of polymers from these anthracenylmethyl (meth) acrylates, by polymerization in the presence of hydroxyalkylacrylate type monomers, glycidylacrylate type monomers and optionally methyl methacrylate type monomers.Finally, the invention relates to anti-reflective coating containing these polymers and which are usable for the manufacture of semiconductor devices. |