| abstract |
The present invention relates to a 9-anthracene alkylacrylate derivative corresponding to the following structural formula: (CF DRAWING IN BOPI) in which, R1 is hydrogen or CH3 R1 to R9, which are the same or different, each represent a hydrogen, hydroxy, methoxycarbonyl, carboxyl, hydroxymethyl, or a C1 to C6 alkyl or alkoxyalkyl, linear or branched, substituted or unsubstituted; and m is an integer of 1 to 4; as well as its method of preparation. The invention also relates to polymers obtainable from this compound and their preparation. Such polymers can be used to make anti-reflection coating compositions useful in sub-microlithography. |