http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2400528-A4
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-046 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-04 |
filingDate | 2010-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c83a24770610cc17a9c4bc91d47b97d7 |
publicationDate | 2013-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | EP-2400528-A4 |
titleOfInvention | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE WITH SILICON CARBIDE |
priorityDate | 2009-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.