| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2005-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d36a8d58938a2b8a14e98087b8f396f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a7a05658647669e8a5cead067a116f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bfd6598be25b8d93e7cfae49bb14682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e967c981e5adc9af89897347f1e8cde3 |
| publicationDate |
2005-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1600814-A2 |
| titleOfInvention |
Coating compositions for use with an overcoated photoresist |
| abstract |
Compositions and methods are provided that can reduce reflection of exposingnradiation from a substrate back into an overcoated photoresist layer and/or function as anplanarizing or via-fill layer. Preferred coating composition and methods of the inventionncan provide enhanced resolution of a patterned overcoated photoresist layer and includenuse of low activation temperature thermal acid generators as well as multiple thermalntreatments to process a layer of the underlying coating composition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9244352-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1705519-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2275490-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1705519-A2 |
| priorityDate |
2004-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |