Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e415f6f1eeb8706d299ea086326248bf |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
filingDate |
2002-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb1ac609aba0a0dfe8d0fe1a046485cf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4dd5a2b5e0671992a8d2ce607212ae27 |
publicationDate |
2002-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-1262831-A2 |
titleOfInvention |
Antireflective coating compositions |
abstract |
Antireflective compositions are provided that contain an ionic thermal acidngenerator material. Use of such a thermal acid generator material can significantlynincrease the shelf life of solutions of antireflective compositions in protic media.nAntireflective compositions of the invention can be effectively used at a variety ofnwavelengths used to expose an overcoated photoresist layer, including 248 nm and 193nnm. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009053832-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009053832-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8088548-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030006956-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1600814-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1600814-A2 |
priorityDate |
2001-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |