| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31786 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K27-0209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K15-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2006-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96bd566fc67725eceeaaacd44058759a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9fbb3868b832970980028799f9e6ec2 |
| publicationDate |
2006-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1705519-A2 |
| titleOfInvention |
Coating compositions for use with an overcoated photoresist |
| abstract |
Organic coating composition are provided including antireflective coating compositions that can reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing or via-fill layer. Preferred compositions of the invention comprise contain a crosslinker component that is resistant to sublimination or other migration crosslinker from the composition coating layer during lithographic processing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7932018-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2275490-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009136242-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8017296-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8486609-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010004378-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8329387-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9244352-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8221965-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7989144-B2 |
| priorityDate |
2005-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |