| abstract |
A method of fabricating a resonator (40) is disclosed. The methodninitially comprises the step of providing a substrate base (50,65) having a dielectricnlayer(s) (70-105). Thereafter, an adhesive layer (115) is formed on the dielectricnlayer(s), and a nucleation promoting film (120) is formed over the adhesive layer. Anzinc oxide layer (125) is subsequently formed over the nucleation promoting film, and antop conductive layer (130) is formed over the layer of zinc oxide. |