http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004047023-B4
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-435 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2437 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-15 |
filingDate | 2004-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2006-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61b6952749691d35c4f8ee0a62ce1903 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfac4ed2d44b21bbf21db97ba6f685d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc385b76fd6a6c28ec53410f5de85d6f |
publicationDate | 2006-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | DE-102004047023-B4 |
titleOfInvention | Dielectric interlayer capacitor structure, method of fabricating the capacitor structure, and use of the capacitor structure |
abstract | Capacitor structure (1) with A lower electrode layer (5) arranged on a substrate surface (31) of a substrate (3), - An upper electrode layer (6) and - Between the electrode layers (5, 6) arranged crystalline dielectric layer with zinc oxide (2), which has a plurality of zinc oxide single crystals each having a polar crystal axis, wherein - an amorphous dielectric interlayer (4) is arranged between the lower electrode layer (5) and the crystalline dielectric layer with zinc oxide (2), characterized in that - The polar crystal axes of the zinc oxide single crystals of the dielectric layer are tilted against the substrate surface (31). |
priorityDate | 2004-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.