| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c0f8dc752059a228fada0efdcc2901b9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76825
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
1998-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bcf14a57385219a0ac70c6dc5ab5cf1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7c42fb75b3ab5a33c35a183931f1f84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbc761ca9108c4e37291f59fcd7dec7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55894e3c320ebc168512d06d3d0da0e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0b708160c0c226949c794f80e228b20 |
| publicationDate |
1998-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0881668-A2 |
| titleOfInvention |
Deposition of an electrically insulating thin film with a low dielectric constant |
| abstract |
This invention pertains to a method for forming thin films on substrates whereinnthe films are produced by applying a solution of an electrically insulating, heat-curingnresin onto the substrate, evaporating the solvent and then exposing the resin to highnenergy radiation to cure the resin. The resin solution contains a substance selected fromnsolvents and gas generating additives that causes dedensification of the film during curenof the resin. This results in a film having a dielectric constant of below 2.7. Thisninvention also pertains to a semiconductor device having an interconnect structurencomprising at least one electrically conductive layer with an interposed insulating layernhaving a dielectric constant of less than 2.7 wherein the insulating layer is produced bynthe method of this invention. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8158992-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6833560-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1308476-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6531193-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6610593-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9293513-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6797554-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-88811-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1018527-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9793328-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1018527-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7732824-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7132693-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6162838-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6509386-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1376713-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1376713-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9963587-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100793043-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6888249-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8735898-B2 |
| priorityDate |
1997-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |