| abstract |
An ink-jet printhead fabrication technique enables capillary channels for liquid ink to benformed with square or rectangular cross-sections. A sacrificial layer is placed over the main surfacenof a silicon chip, the sacrificial layer being patterned in the form of the void formed by the desired inknchannels. A permanent layer, comprising permanent material, is applied over the sacrificial layer,nand, after polishing the two layers to form a uniform surface, the sacrificial layer is removed.nPreferred materials for the sacrificial layer include polyimide while preferred materials for thenpermanent layer include polyarylene ether, although a variety of material combinations are possible. |