| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bddc4f8d1cb2c68028a0c1104d7fb03 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-14419
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-14491 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04516
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J25-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-0452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04543
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1637
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04571
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-0457
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04588
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04591
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-0459
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04596
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04593
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04598
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14427
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1601 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 |
| filingDate |
2003-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2005-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ade433e780794e4875487d9606cec679 |
| publicationDate |
2005-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6905620-B2 |
| titleOfInvention |
Method of fabricating a micro-electromechanical device having a laminated actuator |
| abstract |
A method of fabricating a micro-electromechanical device includes the step of carrying out an integrated circuit fabrication process on a wafer to form control circuitry. Sacrificial material is deposited on the wafer. The sacrificial material is etched to form a deposition zone for a heater layer of a conductive material and contact regions for the heater layer to make electrical contact with the electrical power supply. The heater layer is deposited on the etched sacrificial material. The heater layer is etched so that the heater layer defines a heating circuit. A layer of a dielectric material is deposited on the heater layer. A bend compensator layer of the same material as the heater layer is deposited on the dielectric layer with substantially the same deposition characteristics as applied to the heater layer. The dielectric and bend compensator layers are etched to define the actuator arm. The sacrificial material is etched away. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11247235-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10315220-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11325828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11465175-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9016837-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9016836-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10710118-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10828674-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018035539-A1 |
| priorityDate |
1998-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |