| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bddc4f8d1cb2c68028a0c1104d7fb03 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2201-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-14419
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-14491 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-14427
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1626
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04543
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04588
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04571
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04591
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04596 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01D15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 |
| filingDate |
2003-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ade433e780794e4875487d9606cec679 |
| publicationDate |
2006-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7144519-B2 |
| titleOfInvention |
Method of fabricating an inkjet printhead chip having laminated actuators |
| abstract |
A method of fabricating an inkjet printhead chip which includes the step of fabricating drive circuitry layers on a substrate with a CMOS fabrication process. A first sacrificial layer is deposited on the substrate. A heater layer for heating circuits is deposited on the first sacrificial layer and etched to form the heating circuits. A resiliently flexible layer of dielectric material is deposited on the substrate to cover the heater layer and etched to form actuators and ink ejection members. A second sacrificial layer is deposited on the substrate to cover the actuators and the ink ejection members and etched to define deposition zones for the nozzle chamber walls and the roof walls. A layer of a structural material is deposited on the second sacrificial layer to form the nozzle chamber walls and the roof walls. The sacrificial layers are finally etched away. |
| priorityDate |
1998-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |