| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3215
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02244 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3215
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
1980-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85d6dd1368f5389500af84305c60ea1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d0bb7703bb1f048b27d3f96e508d44b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4e35cb26b417525f5abe9fa2da225e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66704e86348b97a11f833db750621793
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c1f08b1b616994d2751a92dc59d2937
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45ee2f7a60eec53475b8f7f6a5e81e7e |
| publicationDate |
1981-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3037876-A1 |
| titleOfInvention |
METHOD FOR PRODUCING A FINE PATTERN FROM AN ALUMINUM FILM |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0295581-A1 |
| priorityDate |
1979-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |