http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19833755-A1
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a5ea3215d4ccba707b78c4cf9133da5d |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-36 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-00 |
filingDate | 1998-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_277b5a3aae36ba4eb4d0fab9ee4ef6fc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86b0185a3428d29f5dbb0aaede417d6f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a9e45c0bd6a683b36cc08c8c2c2a845 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1dff680962697972aeb938a6b3731cbe |
publicationDate | 2000-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | DE-19833755-A1 |
titleOfInvention | Crystal growing apparatus for growing several SiC single crystals at the same time |
abstract | The invention relates to a crystal growing apparatus for the simultaneous growth of a plurality of SiC single crystals by sublimation, having a SiC storage space, at least one heating device and a plurality of spatially separated crystallization areas, each with a seed crystal holder therein, on which at least one single crystal seed is attached. DOLLAR A The object of the invention is to provide a structure for a growth apparatus for the simultaneous growth of a plurality of SiC single crystals, in which reproducible growth conditions are achieved and defined growth rates can be set for the individual SiC single crystals. DOLLAR A The object is achieved according to the invention in a growth apparatus of the type mentioned at the outset in that all the crystallization regions are in a common reaction space and the seed crystal holders located in the individual crystallization regions are arranged one above the other, preferably in the axis of symmetry of the growth apparatus, the individual crystallization regions are separated from each other by perforated screens. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110396717-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8882077-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110396717-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9376764-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2664695-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111235630-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102732953-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102732953-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2477944-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2477944-A4 |
priorityDate | 1998-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9863 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549006 |
Total number of triples: 27.