| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cfc8211f7ded30d788115c3f10cd955e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0aef0bfb63dfeb98c79d191cd2cf8648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_31b688de4979790e979d0b0ffd281100
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_108a8e26ec18055b0fe6da93d27bb4e0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3063 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3063 |
| filingDate |
2000-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ec22a25ac9ae4ac1e477e8ac6cb3e48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7dee9d1d41fd8334b468ce19787f266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c14da2d3b9e9ae0152269eab578a16f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b80d6548db1b8776edb6c4a66551fe09 |
| publicationDate |
2001-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-10011253-A1 |
| titleOfInvention |
Controlled pore etching in semiconductors |
| abstract |
An apparatus for the electrochemical etching of pores of all types in semiconductors comprises internal longitudinal scales of the whole system located in a suitable size. The balance between the directly dispersed and the oxidizing part of the current and the nucleation of the pores are optimized. The system is synchronized and stabilized using a suitably selected control signal in the frequency region of the internal system frequencies. In-situ measurements of the transfer resistance are used for continuous fine control. Preferred Features: The change of the oxide dispersion kinetics is carried out by changing the HF concentration, by changing the viscosity of the electrolytes and by adjusting the pH value or the temperature. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8188595-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10156406-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7723760-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7723845-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7692926-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7705342-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005040294-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7560018-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10162413-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6872253-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1334955-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1334955-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10162413-A1 |
| priorityDate |
2000-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |