http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107431013-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2016-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107431013-B |
| titleOfInvention | Etching mask, etching mask precursor, manufacturing method of oxide layer, and manufacturing method of thin film transistor |
| abstract | The present invention provides an etching mask (80) for screen printing comprising aliphatic polycarbonate. In addition, the present invention provides a method of manufacturing an oxide layer (channel (44)), comprising: an etching mask forming step of forming a pattern of an etching mask (80) including aliphatic polycarbonate; After the mold forming process, a contact process of contacting with a solution that dissolves the oxide layer (channel (44)) not protected by the etch mask (80); and after the contact process, the oxide layer (channel (44)) )) and the etching mask (80), and a heating process in which the etching mask (80) is heated to a temperature equal to or higher than the temperature at which the etching mask (80) is decomposed. |
| priorityDate | 2015-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 118.