bibliographicCitation |
Liu YX, Zhang QZ, Jiang W, Hou LJ, Jiang XZ, Lu WQ, Wang YN. Collisionless bounce resonance heating in dual-frequency capacitively coupled plasmas. Phys Rev Lett. 2011 Jul 29;107(5):055002. doi: 10.1103/physrevlett.107.055002. PMID: 21867075. |