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bibliographicCitation Subannajui K, Güder F, Danhof J, Menzel A, Yang Y, Kirste L, Wang C, Cimalla V, Schwarz U, Zacharias M. An advanced fabrication method of highly ordered ZnO nanowire arrays on silicon substrates by atomic layer deposition. Nanotechnology. 2012 Jun 15;23(23):235607. doi: 10.1088/0957-4484/23/23/235607. PMID: 22609898.
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identifier https://pubmed.ncbi.nlm.nih.gov/22609898
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title An advanced fabrication method of highly ordered ZnO nanowire arrays on silicon substrates by atomic layer deposition
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