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Yuan X, Xiao D, Yao W, Zhang Z, Yang L, Zhang L, Zeng Y, Liao J, Luo S, Li C, Chen H, Qu X. High-fidelity transfer of area-selective atomic layer deposition grown HfO2 through DNA origami-assisted nanolithography. Nano Research. 2022 Feb 28;15(6):5687–94. doi: 10.1007/s12274-022-4149-1. |