bibliographicCitation |
Zhao L, Yang K, Ai Y, Zhang L, Niu X, Lv H, Zhang Y. Crystal quality improvement of sputtered AlN film on sapphire substrate by high-temperature annealing. Journal of Materials Science: Materials in Electronics. 2018 Jun 21;29(16):13766–73. doi: 10.1007/s10854-018-9507-0. |