reference/12048639

http://rdf.ncbi.nlm.nih.gov/pubchem/reference/12048639

Outgoing Links

Predicate	Object
contentType	Journal Article\|Research Support, Non-U.S. Gov't
endingPage	73
issn	1094-4087
issueIdentifier	3
pageRange	3463-73
publicationName	Optics Express
startingPage	3463
bibliographicCitation	Zhu J, Hu S, Yu J, Zhou S, Tang Y, Zhong M, Zhao L, Chen M, Li L, He Y, Jiang W. Four-quadrant gratings moiré fringe alignment measurement in proximity lithography. Opt Express. 2013 Feb 11;21(3):3463–73. doi: 10.1364/oe.21.003463. PMID: 23481804.
creator	http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_a09c7d5c242161294b55b23afb5f8f8c http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_181dba7376b194edb90e61a43c4f8faf http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_741734cd7dc29bb1028a5f74caeee1c9 http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_a6b5a2db63b0a7c3487b13fa46e56b59 http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_4c3157d64bd54413498740f760dfca2f http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_738125c3199013157ed5db6ddd879979 http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_c6b38b28d8e8302bb848dd41254c1e30 http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_507454b1663ef34b533ed3dea1b7175d http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_dbd008a7e8b97362a1b5d19dc3a5958b http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_02e4bc4e4a5ba848233c80a397b295d6 http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_eaf08d9453e64ddccbeb1a43786ad335
date	2013-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
identifier	https://pubmed.ncbi.nlm.nih.gov/23481804 https://doi.org/10.1364/oe.21.003463
isPartOf	https://portal.issn.org/resource/ISSN/1094-4087 http://rdf.ncbi.nlm.nih.gov/pubchem/journal/29989
language	English
source	https://pubmed.ncbi.nlm.nih.gov/ https://www.crossref.org/
title	Four-quadrant gratings moiré fringe alignment measurement in proximity lithography
hasPrimarySubjectTerm	http://id.nlm.nih.gov/mesh/D012031Q000379 http://id.nlm.nih.gov/mesh/D008029Q000379 http://id.nlm.nih.gov/mesh/D012031Q000295
hasSubjectTerm	http://id.nlm.nih.gov/mesh/D004867 http://id.nlm.nih.gov/mesh/D019544

Total number of triples: 33.