http://rdf.ncbi.nlm.nih.gov/pubchem/reference/11521225
Outgoing Links
Predicate
Object
contentType
Journal Article
endingPage
1765
issn
1539-4794
0146-9592
issueIdentifier
7
pageRange
1762-1765
publicationName
Optics Letters
startingPage
1762
bibliographicCitation
Wang N, Jiang W, Zhang Y. Misalignment sensing with a moiré beat signal for nanolithography. Opt Lett. 2020 Apr 01;45(7):1762–5. doi: 10.1364/ol.383408. PMID: 32235993.
creator
http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_e52ce225bd0c227b3878994f621da6a0
http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_741734cd7dc29bb1028a5f74caeee1c9
http://rdf.ncbi.nlm.nih.gov/pubchem/author/MD5_5f7b8759c6fd560b22e9f0103520d7ed
date
2020-03-18-04:00
^^<
http://www.w3.org/2001/XMLSchema#date
>
identifier
https://pubmed.ncbi.nlm.nih.gov/32235993
https://doi.org/10.1364/ol.383408
isPartOf
http://rdf.ncbi.nlm.nih.gov/pubchem/journal/22734
https://portal.issn.org/resource/ISSN/0146-9592
https://portal.issn.org/resource/ISSN/1539-4794
language
English
source
https://www.crossref.org/
https://pubmed.ncbi.nlm.nih.gov/
title
Misalignment sensing with a moiré beat signal for nanolithography
Total number of triples:
22
.