http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-047
Outgoing Links
| Predicate | Object |
|---|---|
| concordantIPC | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-04 |
| level | 13^^<http://www.w3.org/2001/XMLSchema#integer> |
| symbol | H01L21/047 |
| modified | 2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| title | Making n or p doped regions or layers, e.g. using diffusion using ion implantation characterised by the angle between the ion beam and the crystal planes or the main crystal surface |
| type | http://data.epo.org/linked-data/def/cpc/SubGroup |
| broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-046 |
Incoming Links
Total number of triples: 430.