| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_17e104e2c6e695d7bb045c8d5e75675e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_346ddcdcc3014f68d033fedcb6743ca3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_08fc49ba31f17442fc63b61b194e41e5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3121
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
1999-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33481e406e97c297111294ccd977f9e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0dbd9d6352f3d06c38422d7675cafad |
| publicationDate |
1999-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-9960621-A1 |
| titleOfInvention |
Method and apparatus for treating a semi-conductor substrate |
| abstract |
There is disclosed a method of treating a semi-conductor substrate comprising the steps of: (a) depositing on the substrate a polymer layer; and (b) heating the substrate in the absence of oxygen prior to the deposition of any further layer to substantially remove O-H bonds from the polymer and substantially cure the layer. A silicon-containing compound and a compound containing peroxide bonding may be introduced into the chamber. Also disclosed is an apparatus for implementing the method. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6733830-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6905981-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7544827-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1123991-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1123991-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7144620-B2 |
| priorityDate |
1998-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |