| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30 |
| filingDate |
2020-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb2319e4faff68720cefda4949027d29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0567f729610e08a08cdb5fd169ae1834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c5acc5cc93c371ea23c46a4c78851ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06aa09484cb3ad21f9dadb918955407f |
| publicationDate |
2021-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2021117478-A1 |
| titleOfInvention |
Etching liquid composition and etching method |
| abstract |
Provided is an etching liquid composition capable of etching a silver-containing layer while suppressing the occurrence of side etching and the generation of residue. The present invention provides an etching liquid composition that is used for etching a silver-containing layer. The etching liquid composition contains: a component (A) which is 0.1-20 mass% of an oxidant; a component (B) which is 0.5-40 mass% of at least one of (i) an ammonium salt of a dicarboxylic acid and (ii) a combination of a dicarboxylic acid and an amine compound or an ammonium compound; and water. The dicarboxylic acid is an oxalic acid or an organic acid having an alkylene chain that is unsubstituted or substituted with a hydroxyl group and that has at most 2 carbon atoms. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115141629-A |
| priorityDate |
2019-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |