http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020120520-A1

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filingDate 2019-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97ff41ce1c157870aaa53a31584e5b3e
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publicationDate 2020-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2020120520-A1
titleOfInvention Chemical mechanical polishing of substrates containing copper and ruthenium
abstract The presently claimed invention relates to a chemical-mechanical polishing (CMP) composition and chemical-mechanical polishing (CMP) methods. The presently claimed invention particularly relates to a composition and process for chemical-mechanical polishing of substrates containing copper and ruthenium, specifically, semiconductor substrates containing copper and ruthenium.
priorityDate 2018-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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